| Travel range | 15 mm |
| Sensitivity |
1 µm |
| Tracking accuracy |
2 µm |
| Scale graduation |
10 µm |
| Load capacity |
5 kg |
| 860-0051V-XYZ Vacuum Compatible Translation System
109.66 kB |
860-0051 XYZ Metric stage assembly consists of 3 pieces of 860-0051V, 2 base plates and 1 connecting plate.