Travel range |
15 mm |
Sensitivity |
1 µm |
Tracking accuracy |
2 µm |
Scale graduation |
10 µm |
Load capacity |
5 kg |
860-0051 Translation Stage XYZ
409.31 kB |
XYZ movement, micrometer drive within 15 mm travel range. Vacuum compatible translation system 860-0051V-XYZ is available.
Translation system 860-0051XYZ is assembled of: