| Lead screw pitch | 0.5 mm |
| Resolution in full step | 2.5 µm |
| Max. speed | 5 mm/s |
|
Load capacity Horizontal Vertical |
8 kg 3 kg |
| Vacuum, Torr | 10-6 |
| Motor connector | DB9(M) |
| Stepper motor | VSS42 |
| Wiring scheme of the motor VSS42 | bipolar |
| Design Voltage of the motor VSS42, V | 42 |
| Phase Current of the motor VSS42, A | 1.2 |
| Holding Torque of the motor VSS42, Nm | 0.13 |
| Detent Torque of the motor VSS42, mNm | 5 |
| Phase Resistance of the motor VSS42, Ohm | 1.7 |
| Inductance of the motor VSS42, mH | 3 |
| Steps/Revolution of the motor VSS42 | 200(1.8°) |
|
Assemblies of the motor VSS42 X-Y Z To flat surface |
directly 810-0160V 820-0115V |
| Snap-action limit switch | two end switches |
| Type | Pushed is "closed" |
High vacuum compatible Sub-D, male or female, 9 or 15 pin connectors can be ordered separately. The connectors are made of glass filled polymer with a stainless steel outer and suitable for High Vacuum (10-8 mbar) and temperatures up to 110°C.

Specification of HV Sub-D Connectors:
Vacuum: 10-8 mbar
Body material: DEP
Temp. range: -55°C to 110°C
Pin material: Gold plated copper alloy

Connectors of other sizes and vacuum feedthroughs are available on request.

| 960-0060V Vacuum Compatible Motorized Stages
341.19 kB |
Vacuum Compatible Motorized Stages are equipped with vacuum compatible stepper motor. Stages stack in X-Y configurations directly using M6 screws. Angle Bracket 810-0160V is used to mount stages for vertical translation; it is also used for X-Y-Z configurations. To mount stages on a flat surface you will need 820-0115V base plate.