| Drive type | Side |
| Travel range | 13 mm |
| Sensitivity | 1 µm |
| Angular deviation | < 200 µrad |
| Tracking accuracy | 2 µm |
| Reading accuracy | 5 µm (1/2 division) |
|
Load capacity: |
|
| Lead screw pitch | 0.5 mm |
| Guide | Ball bearings |
| Material | aluminium |
| Finish | black anodized |
| Weight | 0.12 kg |
| Assemblies: X-Y Z |
directly 810-0112 |
| 860-0096 Aluminium Ball Bearing Stage
402.56 kB |